NJIT eTD: The New Jersey Institute of Technology's electronic Theses & Dissertations
Title:
Three-dimensional magnetic field sensor in IBM 0.18¼m CMOS technology
Author:
Wang, Gang
Document Type:
Thesis
Department:
Department of Electrical and Computer Engineering
Degree:
Master of Science
Major:
Electrical Engineering
Advisory Committee:
Misra, Durgamadhab
Sosnowski, Marek
Hou, Edwin
Thesis Date:
2012, May
Keywords:
3D magnetic field sensor
Complementary metaloxidesemiconductor
Availability:
Unrestricted
Abstract:

This work presents a compact three-dimensional Magnetic Field Sensor (MFS) designed in standard Complementary Metal-Oxide-Semiconductor (CMOS) technology. A circular Vertical Hall Device (VHD) for horizontal magnetic field detection and a split- drain Horizontal Hall Device (HHD) for the vertical magnetic field detection are integrated to implement the three-dimensional M FS. This merged design has the advantage of smaller area and lower power consumption. The sensitivity of the vertical hall device (ring-shaped magneto-resistor) and the horizontal hall device (Split-Drain Magnetic Field-Effect Transistor (SD-MAGFET)) is estimated as 0.11V/T and 2.88V/T respectively. The vertical direction of the magnetic field detection demonstrates a higher sensitivity. A high gain cascode differential amplifier is integrated with the sensor to further amplify the magnetic signal.

Complete Thesis:
njit-etd2012-070 (74 pages ~ 1,519 KB pdf)
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Created September 7, 2012
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