| Title: | Chemical vapor deposition of polymeric films |
| Author: | |
| Document Type: | Thesis |
| Department: | Committee for the Interdisciplinary Program in Materials Science and Engineering |
| Degree: | Master of Science |
| Major: | Materials Science and Engineering |
| Advisory Committee: |
Sosnowski, Marek
Grebel, Haim
Iqbal, Zafar
|
| Thesis Date: | 2004, January |
| Keywords: |
Chemical vapor deposition
Plasma enhanced chemical vapor deposition
Carbon films
|
| Availability: | Unrestricted |
| Abstract: |
Poly-peri-naphthalene (PPN) is a one-dimensional (1 -D) graphite polymer with unique planar ladder-like conjugated molecular structure. PPN was predicted to be a good intrinsic conductor and have high thermal stability and high environmental stability. In this project, chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD) of carbon films with PPN structure using PTCDA as precursor were carried out under different conditions. There is only limited information in literature on the synthesis of PPN films by PECVD process, which may allow deposition at a higher rate with lower substrate temperature. In this work the influence of deposition parameters, such as sublimation temperature, substrate (pyrolysis) temperature, pressure, plasma condition on the structure of deposition product was systematically studied. It's found that the following deposition parameters are required for carbon films containing PPN structure:
In the synthesis of PPN films by both methods, substrate temperature plays an important role that affects quality of the films. |
| Complete Thesis: | njit-etd2004-019 (97 pages ~ 8,165 KB pdf) |
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