Synthesis of boron nitride/vycor composite membrane structures by an optimized LPCVD process
Committee for the Interdisciplinary Program in Materials Science and Engineering
Master of Science
Levy, Roland A.
Krasnoperov, Lev N.
Grow, James M.
Chemical vapor deposition.
Gas separation membranes.
Low pressure chemical vapor deposition.
Since the advent of the idea of ultrafiltration, microporous membranes have come through a long way in establishing a niche as an efficient technology for gas separation applications. More and more research is aimed at reducing pore size towards nanolevels, when separation factor is the criterion rather than the permeability. This work is focused at synthesizing and characterizing microporous inorganic membranes for gas separations by molecular sieving. BN was deposited on mesoporous vycor tubes using triethylamine borane complex (TEAB) and ammonia as precursors. Effect of temperature and deposition geometry on permeability of various gases has been studied. Very high selectivities have been achieved for separation of small inorganic gases such as He, H2 from N2. Activation energy study indicate that the permeability of He and H2 are thermally activated with activation energies of 39.7 kJ/mol and 5O kJ/mol respectively. XRD analysis indicate an amorphous BN deposit in the vycor tube.
njit-etd1995-030 (66 pages ~ 3,023 KB pdf)
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Created October 22, 2008